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Germanium Surface Preparation Methods by Jungyup Kim (Paperback, 2008)

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About this product

Product Information

Germanium is gaining interest in the semiconductor industry as a replacement channel material for high mobility applications. Con-tamination directly affects the device performance, yield and reliability. Therefore, continued device scaling is dependent on effective surface preparation including effective contamination and particle removal of germanium surface. Cleaning and preparation methods for silicon surface have been extensively developed over the past few decades. Germanium surface cleaning and preparation is at its infancy and is markedly different from that of silicon. This book examines these differences and fundamentals involved in germanium surface cleaning. This book also proposes methods for basic germanium surface cleaning and the basis for further process develop-ment for professionals involved in surface cleaning of semiconductor materials.

Product Identifiers

PublisherVdm Verlag Dr. Mueller E.K.

ISBN-139783836484114

eBay Product ID (ePID)18049029734

Product Key Features

Number of Pages108 Pages

LanguageEnglish

Publication NameGermanium Surface Preparation Methods

Publication Year2008

SubjectEngineering & Technology

TypeTextbook

AuthorJungyup Kim

FormatPaperback

Dimensions

Item Height229 mm

Item Weight154 g

Item Width152 mm

Additional Product Features

Country/Region of ManufactureGermany

Title_AuthorJungyup Kim