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About this product
Product Identifiers
BrandBrooks
MPN5850E
eBay Product ID (ePID)1800263850
Product Key Features
Maximum Flow Rate100 SCCM
Port Diameter1/4 in
Gas MediaO2 [Oxygen], BF3 [Boron Trifluoride], N2 [Nitrogen], CF4 [Tetrafluoromethane], Air, NH3 [Ammonia]
