User's Guide to Vacuum Technology by John F. O'Hanlon (2003, Hardcover)

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Item specifics

Condition
Very Good: A book that has been read but is in excellent condition. No obvious damage to the cover, ...
ISBN
9780471270522
Category

About this product

Product Identifiers

Publisher
Wiley & Sons, Incorporated, John
ISBN-10
0471270520
ISBN-13
9780471270522
eBay Product ID (ePID)
2461878

Product Key Features

Number of Pages
536 Pages
Language
English
Publication Name
User's Guide to Vacuum Technology
Subject
General, Physics / General
Publication Year
2003
Features
Revised
Type
Textbook
Subject Area
Technology & Engineering, Science
Author
John F. O'hanlon
Format
Hardcover

Dimensions

Item Height
1.2 in
Item Weight
32.1 Oz
Item Length
9.4 in
Item Width
6.1 in

Additional Product Features

Edition Number
3
Intended Audience
Scholarly & Professional
LCCN
2003-045051
Dewey Edition
21
Reviews
"...an excellent handbook for engineers, scientists, or anybody who uses vacuum systems on a regular basis." ( IEEE Circuits & Devices Magazine , May/June 2005) "...clearly written with...many helpful hints...highly recommended." ( MRS Bulletin , January 2005) "This book...is particularly valuable as a reference for those who work practically with vacuum technologies and a must-buy for those who design them." ( JOM , February 26, 2004), "...an excellent handbook for engineers, scientists, or anybody who uses vacuum systems on a regular basis." ( IEEE Circuits & Devices Magazine , May/June 2005) "...clearly written with...many helpful hints...highly recommended." ( MRS Bulletin , January 2005) "This book sucks in a good way...the third edition will never get dusty on my bookshelf...although the text is certainly not coffee-table reading material, it will have a wide appeal...it is particularly valuable as a reference for those who work practically with vacuum technologies and a must-buy for those who design them." ( JOM , February 26, 2004) "...a fundamental understanding of modern vacuum technology and a practical user's perspective of laboratory and industrial vacuum technology. This edition, while still providing core information in a very practical style...covers many new advances in the field...there are loads of graphs, data, and tables to provide practical and useful information to the vacuum user." ( IEEE Electrical Insulation Magazine )
TitleLeading
A
Illustrated
Yes
Dewey Decimal
621.5/5
Edition Description
Revised edition
Table Of Content
Its Basis 1. Vacuum Technology 3 2. Gas Properties 9 3. Gas Flow 25 4. Gas Release from Solids 57 Measurements 5. Pressure Gauges 81 6. Flow Meters 109 7. Pumping Speed 123 8. Residual Gas Analyzers 133 9. Interpretation of RGA Data 161 Production 10. Mechanical Pumps 183 11. Turbomolecular Pumps 201 12. Diffusion Pumps 217 13. Pump Fluids 229 14. Getter and Ion Pumps 247 15. Cryogenic Pumps 263 Materials 16. Materials in Vacuum 289 17. Joints, Seals, and Valves 313 18. Lubrication 345 Systems 19. Rough Vacuum Pumping 359 20. High Vacuum Systems 379 21. Ultraclean Vacuum Systems 403 22. High Flow Systems 415 23. Multichamber Systems 431 24. Leak Detection 447 Symbols 459 Appendixes A. Units and Constants 463 B. Gas Properties 466 C. Material Properties 478 D. Isotopic Abundances 488 E. Cracking Patterns 492 F. Pump Fluid Properties 498 Index 505
Synopsis
The leading text in the field fully updated to reflect changes in vacuum technology In the decade and a half since the publication of the Second Edition of A User's Guide to Vacuum Technology there have been many important advances in the field, including spinning rotor gauges, dry mechanical pumps, magnetically levitated turbo pumps, and ultraclean system designs. These, along with improved cleaning and assembly techniques have made contamination-free manufacturing a reality. Designed to bridge the gap in both knowledge and training between designers and end users of vacuum equipment, the Third Edition offers a practical perspective on today's vacuum technology. With a focus on the operation, understanding, and selection of equipment for industrial processes used in semiconductor, optics, packaging, and related coating technologies, A User's Guide to Vacuum Technology, Third Edition provides a detailed treatment of this important field. While emphasizing the fundamentals and touching on significant topics not adequately covered elsewhere, the text avoids topics not relevant to the typical user. The Third Edition features significant additions, including: Updated coverage of all topics A discussion of SI units and their conversion Expanded coverage of gauges, pumps, materials, components, and systems A discussion of ultraclean vacuum systems now used routinely in high-volume production of semiconductor chips and related process-sensitive devices A review of rough pumping and crossover, including methods for prevention of aerosol formation As with previous editions, the Third Edition is an important resource for both students and professionals in microelectronics, optics, thin-film coating, and other industries dependent on leading-edge applications of vacuum technology., This new edition of a bestseller focuses on the understanding, operation and selection of equipment for processes used in semiconductor, optics and related technologies. The book emphasizes subjects not adequately covered elsewhere, while avoiding in-depth treatments of topics interesting only to the designer or curator., In the decade and a half since the publication of the Second Edition of A User's Guide to Vacuum Technology there have been many important advances in the field, including spinning rotor gauges, dry mechanical pumps, magnetically levitated turbo pumps, and ultraclean system designs. These, along with improved cleaning and assembly techniques have made contamination-free manufacturing a reality. Designed to bridge the gap in both knowledge and training between designers and end users of vacuum equipment, the Third Edition offers a practical perspective on today's vacuum technology. With a focus on the operation, understanding, and selection of equipment for industrial processes used in semiconductor, optics, packaging, and related coating technologies, A User's Guide to Vacuum Technology , Third Edition provides a detailed treatment of this important field. While emphasizing the fundamentals and touching on significant topics not adequately covered elsewhere, the text avoids topics not relevant to the typical user., Im Mittelpunkt der Neuauflage dieses Bestsellers steht die Funktionsweise, der Betrieb und die Auswahl von technischer Ausrüstung für die Halbleiter- und optische Industrie im weitesten Sinne. Alle Angaben zu Bauelementen wurden dem aktuellen Stand der Technik angepasst; der Problemkreis des Ultrahochvakuums wird komplett abgedeckt. Ein 500-seitiger Ergänzungsband für Studenten und Dozenten enthält Übungsaufgaben und Lösungen.
LC Classification Number
TJ940.O37 2003

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